Invention Grant
- Patent Title: Method of treatment of an electronic circuit for a hybrid molecular bonding
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Application No.: US17320310Application Date: 2021-05-14
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Publication No.: US11715710B2Publication Date: 2023-08-01
- Inventor: Emilie Bourjot , Amandine Jouve , Frank Fournel , Christophe Dubarry
- Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee Address: FR Paris
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: FR 05055 2020.05.19
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A method of treatment of an electronic circuit including at a location at least one electrically-conductive test pad having a first exposed surface. The method includes the at least partial etching of the test pad from the first surface, and the forming on the electronic circuit of an interconnection level covering said location and including, on the side opposite to said location, a second planar surface adapted for the performing of a hybrid molecular bonding.
Public/Granted literature
- US20210366851A1 METHOD OF TREATMENT OF AN ELECTRONIC CIRCUIT FOR A HYBRID MOLECULAR BONDING Public/Granted day:2021-11-25
Information query
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