Invention Grant
- Patent Title: Nonvolatile memory device and method for fabricating the same
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Application No.: US17323076Application Date: 2021-05-18
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Publication No.: US11715712B2Publication Date: 2023-08-01
- Inventor: Sung-Min Hwang , Ji Won Kim , Jae Ho Ahn , Joon-Sung Lim , Suk Kang Sung
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20200127835 2020.10.05
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065 ; H01L25/18

Abstract:
A nonvolatile memory device includes an upper insulating layer. A first substrate is on the upper insulating layer. An upper interlayer insulating layer is on the first substrate. A plurality of word lines is stacked on the first substrate in a first direction and extends through a partial portion of the upper interlayer insulating layer. A lower interlayer insulating layer is on the upper interlayer insulating layer. A second substrate is on the lower interlayer insulating layer. A lower insulating layer is on the second substrate. A dummy pattern is composed of dummy material. The dummy pattern is disposed in a trench formed in at least one of the first and second substrates. The trench is formed on at least one of a surface where the upper insulating layer meets the first substrate, and a surface where the lower insulating layer meets the second substrate.
Public/Granted literature
- US20220108963A1 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-04-07
Information query
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