Invention Grant
- Patent Title: Metal fuse and self-aligned gate edge (SAGE) architecture having a metal fuse
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Application No.: US17676734Application Date: 2022-02-21
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Publication No.: US11715737B2Publication Date: 2023-08-01
- Inventor: Rohan K. Bambery , Walid M. Hafez , Mong-Kai Wu
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- The original application number of the division: US16347183
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/092 ; H01L23/525

Abstract:
Metal fuses and self-aligned gate edge (SAGE) architectures having metal fuses are described. In an example, an integrated circuit structure includes a plurality of semiconductor fins protruding through a trench isolation region above a substrate. A first gate structure is over a first of the plurality of semiconductor fins. A second gate structure is over a second of the plurality of semiconductor fins. A gate edge isolation structure is laterally between and in contact with the first gate structure and the second gate structure. The gate edge isolation structure is on the trench isolation region and extends above an uppermost surface of the first gate structure and the second gate structure. A metal fuse is on the gate edge isolation structure.
Public/Granted literature
- US20220173105A1 METAL FUSE AND SELF-ALIGNED GATE EDGE (SAGE) ARCHITECTURE HAVING A METAL FUSE Public/Granted day:2022-06-02
Information query
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