Invention Grant
- Patent Title: Optical crosstalk mitigation for a detector array in an optical receiver
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Application No.: US17354072Application Date: 2021-06-22
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Publication No.: US11715750B2Publication Date: 2023-08-01
- Inventor: Wojciech Kudla , Boris Kirillov , Marijn Van Os , Harm Wichers
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Harrity & Harrity, LLP
- The original application number of the division: US16590702 2019.10.02
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A method of manufacturing a photodetector device is provided. The method includes providing a photodetector array comprising an array of photodetectors and a plurality of metal structures arranged laterally between photodetectors of the array of photodetectors, wherein the photodetectors are co-planar with the plurality of metal structures, and wherein the plurality of metal structures are arranged in a first pattern; applying an antireflective coating to a surface of a transparent substrate, the antireflective coating being patterned according to a second pattern that matches the first pattern; aligning the transparent substrate over the photodetector array such that the first pattern is aligned with the second pattern; and coupling the transparent substrate to the photodetector array such that the antireflective coating covers the plurality of metal structures.
Public/Granted literature
- US20210313370A1 OPTICAL CROSSTALK MITIGATION FOR A DETECTOR ARRAY IN AN OPTICAL RECEIVER Public/Granted day:2021-10-07
Information query
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