Invention Grant
- Patent Title: Forming semiconductor structures with semimetal features
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Application No.: US16682897Application Date: 2019-11-13
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Publication No.: US11715770B2Publication Date: 2023-08-01
- Inventor: Che-Wei Yang , Hao-Hsiung Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd. , National Taiwan University
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed IP Law Group
- The original application number of the division: US15922730 2018.03.15
- Main IPC: H01L29/24
- IPC: H01L29/24 ; H01L21/8238 ; H01L29/10 ; H01L27/092

Abstract:
The current disclosure describes semiconductor devices, e.g., transistors including a thin semimetal layer as a channel region over a substrate, which includes bandgap opening and exhibits semiconductor properties. Described semiconductor devices include source/drain regions that include a thicker semimetal layer over the thin semimetal layer serving as the channel region, this thicker semimetal layer exhibiting metal properties. The semimetal used for the source/drain regions include a same or similar semimetal material as the semimetal of the channel region.
Public/Granted literature
- US20200083333A1 FORMING SEMICONDUCTOR STRUCTURES WITH SEMIMETAL FEATURES Public/Granted day:2020-03-12
Information query
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