Invention Grant
- Patent Title: Barrier structure configured to increase performance of III-V devices
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Application No.: US16872551Application Date: 2020-05-12
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Publication No.: US11715792B2Publication Date: 2023-08-01
- Inventor: Yun-Hsiang Wang , Chun Lin Tsai , Jiun-Lei Jerry Yu , Po-Chih Chen , Chia-Ling Yeh , Ching Yu Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/778 ; H01L29/205 ; H01L29/20

Abstract:
Various embodiments of the present disclosure are directed toward an integrated chip including an undoped layer overlying a substrate. A first barrier layer overlies the undoped layer. A doped layer overlies the first barrier layer. Further, a second barrier layer overlies the first barrier layer, where the second barrier layer is laterally offset from a perimeter of the doped layer by a non-zero distance. The first and second barrier layers comprise a same III-V semiconductor material. A first atomic percentage of a first element within the first barrier layer is less than a second atomic percentage of the first element within the second barrier layer.
Public/Granted literature
- US20210242337A1 BARRIER STRUCTURE CONFIGURED TO INCREASE PERFORMANCE OF III-V DEVICES Public/Granted day:2021-08-05
Information query
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