Invention Grant
- Patent Title: Three-dimensional memory devices having through stair contacts and methods for forming the same
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Application No.: US17097635Application Date: 2020-11-13
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Publication No.: US11716846B2Publication Date: 2023-08-01
- Inventor: Qinxiang Wei , Jianhua Sun , Ji Xia
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B43/35 ; H10B43/40 ; H01L21/768 ; H01L23/522 ; H01L21/28

Abstract:
Embodiments of three-dimensional (3D) memory devices having through stair contacts (TSCs) and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack and a TSC. The memory stack includes a plurality of interleaved conductive layers and dielectric layers. Edges of the interleaved conductive layers and dielectric layers define a staircase structure on a side of the memory stack. The TSC extends vertically through the staircase structure of the memory stack. The TSC includes a conductor layer and a spacer circumscribing the conductor layer.
Public/Granted literature
- US20210082953A1 THREE-DIMENSIONAL MEMORY DEVICES HAVING THROUGH STAIR CONTACTS AND METHODS FOR FORMING THE SAME Public/Granted day:2021-03-18
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