Apparatus and methods for delivering electromagnetic energy to a patient's tissue and reducing pain experienced by the patient during treatment of the patient's tissue with the delivered electromagnetic energy. The tissue treatment apparatus includes a delivery device configured to transfer the electromagnetic energy through the skin surface to a region of tissue, and also includes a vibration device that is mechanically coupled with the delivery device. The vibration device is configured to transfer mechanical vibrations along an axis substantially normal to the skin surface to the region of tissue being treated.