Invention Grant
- Patent Title: Polyurethane polishing pad and composition for manufacturing the same
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Application No.: US16668383Application Date: 2019-10-30
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Publication No.: US11717932B2Publication Date: 2023-08-08
- Inventor: Kwang-Bok Kim
- Applicant: XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Applicant Address: CN Qingdao
- Assignee: XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Current Assignee: XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Current Assignee Address: CN Qingdao
- Agency: ScienBiziP, P.C.
- Main IPC: B24B37/10
- IPC: B24B37/10 ; B24B37/24 ; B24B37/32 ; C08G18/38 ; C08G18/48 ; C08G18/66 ; C08G18/76 ; C08K3/013 ; C08K3/04 ; C08K3/22 ; C08K5/18 ; C08L75/04 ; H01L21/321

Abstract:
The present disclosure provides a composition for manufacturing a polyurethane polishing pad. The composition includes 15 to 25 wt % of MBCA, 25 to 45 wt % of isocyanates, 15 to 45 wt % of polyols, 5 to 35 wt % of EOPO, and 1 to 5 wt % of additives. The polyurethane polishing pad made from the composition of the present disclosure has a hardness within a range of 40 to 70 shore D, an elongation within a range of 200 to 400%, a density within a range of 0.7 to 0.9 g/cc, a modulus within a range of 25000 to 40000 kg/cm2, and a tensile stress within a range of 120 to 320 kg/cm2.
Public/Granted literature
- US20200215662A1 POLYURETHANE POLISHING PAD AND COMPOSITION FOR MANUFACTURING THE SAME Public/Granted day:2020-07-09
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