Invention Grant
- Patent Title: Bolometer and method for manufacturing same
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Application No.: US17731808Application Date: 2022-04-28
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Publication No.: US11719581B2Publication Date: 2023-08-08
- Inventor: Mayumi Kosaka
- Applicant: NEC Corporation
- Applicant Address: JP Tokyo
- Assignee: NEC CORPORATION
- Current Assignee: NEC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP 21080925 2021.05.12
- Main IPC: G01J5/22
- IPC: G01J5/22

Abstract:
An object of the present invention is to provide a bolometer having a high TCR value and a low resistance, and a method for manufacturing the same.
The present invention relates to a bolometer manufacturing method including: fabricating a set of two carbon nanotube wires that are approximately parallel to each other at edges of a line shape, or fabricating a circular shape carbon nanotube wire at a circular circumference of a circular shape, by applying a semiconducting carbon nanotube dispersion liquid in the line shape or the circular shape on a substrate, and drying the dispersion liquid, a width of each wire being 5 μm or more; and connecting a part of each wire to a first electrode and a second electrode.
The present invention relates to a bolometer manufacturing method including: fabricating a set of two carbon nanotube wires that are approximately parallel to each other at edges of a line shape, or fabricating a circular shape carbon nanotube wire at a circular circumference of a circular shape, by applying a semiconducting carbon nanotube dispersion liquid in the line shape or the circular shape on a substrate, and drying the dispersion liquid, a width of each wire being 5 μm or more; and connecting a part of each wire to a first electrode and a second electrode.
Public/Granted literature
- US20220364933A1 BOLOMETER AND METHOD FOR MANUFACTURING SAME Public/Granted day:2022-11-17
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