Invention Grant
- Patent Title: Gas leak sensing device, setting method for gas leak sensing, gas leak sensing method, and tangible medium
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Application No.: US17365391Application Date: 2021-07-01
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Publication No.: US11719596B2Publication Date: 2023-08-08
- Inventor: Akio Furuse , Satoru Sasaki
- Applicant: COSMO INSTRUMENTS CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: COSMO INSTRUMENTS CO., LTD.
- Current Assignee: COSMO INSTRUMENTS CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP 20153483 2020.09.14
- Main IPC: G01M3/32
- IPC: G01M3/32 ; G01F5/00

Abstract:
A gas leak sensing device includes a constant flow rate control valve, a pressurization control valve, a supply-side gas circuit, a master-side gas circuit, a workpiece-side gas circuit, an equal pressure valve, an exhaust valve, a test pressure sensor, and a differential pressure sensor. The supply-side gas circuit is connected with the constant flow rate control valve and the pressurization control valve. The equal pressure valve performs opening and closing between the supply-side gas circuit and the master-side gas circuit and opening and closing between the supply-side gas circuit and the workpiece-side gas circuit. The exhaust valve performs opening and closing between the workpiece-side gas circuit and outside. The test pressure sensor detects pressure in the supply-side gas circuit. The differential pressure sensor detects a differential pressure between the master-side gas circuit and the workpiece-side gas circuit.
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