Invention Grant
- Patent Title: Sensor and electric device
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Application No.: US17668264Application Date: 2022-02-09
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Publication No.: US11719722B2Publication Date: 2023-08-08
- Inventor: Hiroaki Yamazaki
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP 21149129 2021.09.14
- Main IPC: G01R1/20
- IPC: G01R1/20 ; G01R19/00

Abstract:
According to one embodiment, a sensor includes a base including a first face, and a first structure body fixed to the first face. The first structure body includes first and second support portions, a first movable portion, and a first fixed electrode. The first support portion is fixed to the first surface. The second support portion is fixed to the first face and provided around the first support portion. The first movable portion is supported by the first and second support portions and apart from the base. The first fixed electrode is fixed to the first face. The first movable portion includes a first movable electrode and a first conductive member. A first current is configured to flow the first conductive member. The first fixed electrode faces the first movable electrode. A first gap is provided between the first fixed electrode and the first movable portion.
Public/Granted literature
- US20230079378A1 SENSOR AND ELECTRIC DEVICE Public/Granted day:2023-03-16
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