Invention Grant
- Patent Title: Positive resist composition and patterning process
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Application No.: US17062048Application Date: 2020-10-02
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Publication No.: US11720021B2Publication Date: 2023-08-08
- Inventor: Jun Hatakeyama , Masahiro Fukushima
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: WHDA, LLP
- Priority: JP 19191782 2019.10.21
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; C08F212/14 ; C08F220/18 ; C08F220/30 ; C08F20/52 ; C08F220/56

Abstract:
A positive resist composition comprising a base polymer comprising recurring units (a) containing an imide group having an iodized aromatic group bonded thereto and recurring units (b1) having an acid labile group-substituted carboxyl group and/or recurring units (b2) having an acid labile group-substituted phenolic hydroxyl group has a high sensitivity and resolution and forms a pattern of good profile with reduced edge roughness and size variation.
Public/Granted literature
- US20210116808A1 POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS Public/Granted day:2021-04-22
Information query
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