Invention Grant
- Patent Title: Material for forming organic film, method for forming organic film, patterning process, and compound
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Application No.: US17089259Application Date: 2020-11-04
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Publication No.: US11720023B2Publication Date: 2023-08-08
- Inventor: Daisuke Kori , Takayoshi Nakahara , Yusuke Biyajima
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 19224907 2019.12.12
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C07D209/48 ; C07D403/14 ; C07D487/04 ; C08F26/06 ; C09D139/04 ; G03F7/09 ; H01L21/027 ; H01L21/033 ; H01L21/768

Abstract:
The present invention provides a material for forming an organic film, containing a compound shown by the following general formula (1), and an organic solvent, where X represents an organic group having a valency of n1 and 2 to 50 carbon atoms, n1 represents an integer of 1 to 10, and R1 represents at least one or more of the following general formulae (2) to (4). This aims to provide an organic film material for forming an organic film that has all of high filling property, high planarizing property, and excellent adhesive force to a substrate.
Public/Granted literature
- US20210181637A1 MATERIAL FOR FORMING ORGANIC FILM, METHOD FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPOUND Public/Granted day:2021-06-17
Information query
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