- Patent Title: Article manufacturing method, film forming method, mold manufacturing method, exposure apparatus, information processing method, and non-transitory computer-readable medium storing a program
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Application No.: US16935822Application Date: 2020-07-22
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Publication No.: US11721556B2Publication Date: 2023-08-08
- Inventor: Hiroshi Kurosawa
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP 19141682 2019.07.31
- Main IPC: H01L21/308
- IPC: H01L21/308 ; G03F7/20 ; G03F7/00 ; H01L21/027 ; H01L21/66
Abstract:
An article manufacturing method includes a first formation step of forming a focus compensation film on a substrate, a second formation step of forming a resist layer on the focus compensation film, and a transfer step of transferring a pattern of an original to the resist layer using an exposure apparatus. In the first formation step, the focus compensation film is formed such that the focus compensation film has a top surface shape corresponding to an image surface shape of the exposure apparatus.
Public/Granted literature
Information query
IPC分类:
