Invention Grant
- Patent Title: System and method for supplying chemical solution
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Application No.: US16932649Application Date: 2020-07-17
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Publication No.: US11721561B2Publication Date: 2023-08-08
- Inventor: Chih-Chiang Tseng , Ming-Lee Lee , Chiang Jen Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT Law
- Agent Anthony King
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01R29/12 ; F04B49/00

Abstract:
A system includes a chemical storage tank, a pipeline, a pump, a first electrostatic probe, and a control unit. The pipeline is connected to the chemical storage tank. The pump is connected to the pipeline and configured to pump a chemical solution from the chemical storage tank into the pipeline. The first electrostatic probe is coupled to the pump and configured to measure an electrostatic voltage of the pump. The control unit is coupled to the first electrostatic probe and configured to obtain a measurement of an electrostatic voltage from the first electrostatic probe.
Public/Granted literature
- US20220020608A1 SYSTEM AND METHOD FOR SUPPLYING CHEMICAL SOLUTION Public/Granted day:2022-01-20
Information query
IPC分类: