Invention Grant
- Patent Title: System and method for operating the same
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Application No.: US17576994Application Date: 2022-01-16
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Publication No.: US11721567B2Publication Date: 2023-08-08
- Inventor: Jia-Rong Xiao , Wei-Hsiang Huang , Sen-Yeo Peng , Chui-Ya Peng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- The original application number of the division: US16510552 2019.07.12
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
A system includes a cleaning device and a concentration measuring device. The cleaning device includes a first pipe and a first pump. The first pump is configured to move first liquid in the first pipe. Two terminals of the first pump are respectively coupled to the first pipe. The concentration measuring device includes a tube, a cooler, a concentration meter and a second pump. The tube is coupled to the first pipe, and is configured to retrieve the first liquid. The cooler covers the tube to cool the first liquid. The concentration meter is configured to measure a concentration of the first liquid cooled by the cooler. The second pump is coupled to the tube, and is configured to move the first liquid according to the concentration.
Public/Granted literature
- US20220139742A1 SYSTEM AND METHOD FOR OPERATING THE SAME Public/Granted day:2022-05-05
Information query
IPC分类: