Invention Grant
- Patent Title: Method and apparatus for determining a position of a ring within a process kit
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Application No.: US17352097Application Date: 2021-06-18
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Publication No.: US11721569B2Publication Date: 2023-08-08
- Inventor: Andrew Myles , Andreas Schmid , Phillip A. Criminale , Steven E. Babayan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01B11/27 ; G01B9/02002 ; G05B23/02 ; H01L21/687

Abstract:
Examples disclosed herein are directed to a method and apparatus for determining a position of a ring within a process kit. In one example, a sensor assembly for a substrate processing chamber is provided. The sensor assembly includes a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface. The housing also has a recess in the top surface, the recess forming an interior volume within the housing. The sensory assembly includes a bias member, and a contact member disposed on the bias member. The bias member and contact member are disposed within the recess. A sensor is configured to detect a displacement of the contact member. The displacement of the contact member corresponds to a relative position of an edge ring.
Public/Granted literature
- US20220406635A1 METHOD AND APPARATUS FOR DETERMINING A POSITION OF A RING WITHIN A PROCESS KIT Public/Granted day:2022-12-22
Information query
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