Invention Grant
- Patent Title: Member for electrostatic chuck and electrostatic chuck
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Application No.: US17381790Application Date: 2021-07-21
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Publication No.: US11721574B2Publication Date: 2023-08-08
- Inventor: Michio Horiuchi , Masaya Tsuno
- Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Applicant Address: JP Nagano
- Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Current Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Current Assignee Address: JP Nagano
- Agency: Rankin, Hill & Clark LLP
- Priority: JP 20132023 2020.08.03
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32
Abstract:
A lanthanoid element is included in a part of a material of a member for an electrostatic chuck configured to suck a target object by using an electrostatic force. When electromagnetic waves in a wavelength region shorter than 400 nm are irradiated, the member emits light in a wavelength region different from the wavelength region.
Public/Granted literature
- US20220037187A1 MEMBER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK Public/Granted day:2022-02-03
Information query
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