Invention Grant
- Patent Title: Wafer bonding method and wafer bonding apparatus
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Application No.: US17089183Application Date: 2020-11-04
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Publication No.: US11721662B2Publication Date: 2023-08-08
- Inventor: Yun-Tai Shih , Ching-Hou Su , Chyi-Tsong Ni , I-Shi Wang , Jeng-Hao Lin , Kuan-Ming Pan , Jui-Mu Cho , Wun-Kai Tsai
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- The original application number of the division: US14819552 2015.08.06
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/544 ; H01L21/68 ; H01L21/67

Abstract:
A method of aligning two wafers during a bonding process includes aligning a first wafer having a plurality of alignment markings with a second wafer having a plurality of alignment markings. The method further includes placing a plurality of flags between the first wafer and the second wafer. The method further includes detecting movement of the plurality of flags with respect to the first wafer and the second wafer using at least one sensor. The method further includes determining whether the wafers remain aligned within an alignment tolerance based on the detected movement of the plurality of flags relative to the first wafer and the second wafer.
Public/Granted literature
- US20210050324A1 WAFER BONDING METHOD AND WAFER BONDING APPARATUS Public/Granted day:2021-02-18
Information query
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