- Patent Title: Mask transfer method (and related apparatus) for a bumping process
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Application No.: US17680220Application Date: 2022-02-24
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Publication No.: US11721683B2Publication Date: 2023-08-08
- Inventor: Ching-Sheng Chu , Chern-Yow Hsu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16841978 2020.04.07
- Main IPC: H01L25/16
- IPC: H01L25/16 ; H01L33/00 ; H01L33/62

Abstract:
Various embodiments of the present disclosure are directed towards an integrated chip (IC). The IC includes a first dielectric structure having first inner sidewalls over an interlayer dielectric (ILD) structure. A second dielectric structure is over the first dielectric structure, where the first inner sidewalls are between second inner sidewalls of the second dielectric structure. A sidewall barrier structure is over the first dielectric structure and extends vertically along the second inner sidewalls. A lower bumping structure is between the second inner sidewalls and extends vertically along the first inner sidewalls and vertically along third inner sidewalls of the sidewall barrier structure. An upper bumping structure is over both the lower bumping structure and the sidewall barrier structure and between the second inner sidewalls, where an uppermost point of the upper bumping structure is at or below an uppermost point of the second dielectric structure.
Public/Granted literature
- US20220181312A1 MASK TRANSFER METHOD (AND RELATED APPARATUS) FOR A BUMPING PROCESS Public/Granted day:2022-06-09
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