Invention Grant
- Patent Title: Acoustic wave element
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Application No.: US16485759Application Date: 2018-02-14
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Publication No.: US11722121B2Publication Date: 2023-08-08
- Inventor: Tetsuya Kishino , Motoki Ito
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio Cory Hargreaves and Savitch LLP
- Priority: JP 17025276 2017.02.14 JP 17025277 2017.02.14 JP 17025278 2017.02.14
- International Application: PCT/JP2018/005063 2018.02.14
- International Announcement: WO2018/151147A 2018.08.23
- Date entered country: 2019-08-13
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H03H9/02 ; H03H9/145

Abstract:
An acoustic wave element includes an IDT electrode including electrode fingers, a first substrate on an upper surface of which the IDT electrode is located, which has a thickness of less than 2 times a repetition interval of the electrode fingers and is configured by a piezoelectric crystal, a second substrate bonded to a lower surface of the first substrate, and configured by an Si single crystal having a plane orientation of a (100) plane or (110) plane or a plane equal to them, in which substrate a crystal axis of the Si single crystal parallel to a substrate surface of Si single crystal is inclined at any angle of 25° to 65°, 115° to 155°, 205° to 245°, and 295° to 345° relative to a direction of propagation of an acoustic wave when viewed from the upper surface of the superposed first substrate.
Public/Granted literature
- US20200028486A1 ACOUSTIC WAVE ELEMENT Public/Granted day:2020-01-23
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