Invention Grant
- Patent Title: Micro-filter and acoustic device
-
Application No.: US17623304Application Date: 2019-07-05
-
Publication No.: US11722808B2Publication Date: 2023-08-08
- Inventor: Yujing Lin
- Applicant: Weifang Goertek Microelectronics Co., Ltd.
- Applicant Address: CN Shandong
- Assignee: Weifang Goertek Microelectronics Co., Ltd.
- Current Assignee: Weifang Goertek Microelectronics Co., Ltd.
- Current Assignee Address: CN Shandong
- Agency: Baker Botts LLP
- Priority: CN 1910579444.8 2019.06.28
- International Application: PCT/CN2019/094776 2019.07.05
- International Announcement: WO2020/258363A 2020.12.30
- Date entered country: 2021-12-28
- Main IPC: H04R1/02
- IPC: H04R1/02 ; H04R1/08

Abstract:
Disclosed is a micro-filter comprising a substrate with a back cavity and a film layer provided on the substrate and suspended above the back cavity; the film layer has through holes distributed thereon, and is made of an amorphous metal film. Also disclosed is an acoustic device comprising the micro-filter.
Public/Granted literature
- US20220377442A1 MICRO-FILTER AND ACOUSTIC DEVICE Public/Granted day:2022-11-24
Information query