Invention Grant
- Patent Title: Capacitor structure, method for manufacturing same, and memory
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Application No.: US17369114Application Date: 2021-07-07
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Publication No.: US11723185B2Publication Date: 2023-08-08
- Inventor: WenLi Chen
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Cooper Legal Group, LLC
- Priority: CN 2010809896.3 2020.08.13
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L49/02 ; H10B12/00

Abstract:
The present application relates to a capacitor structure and a method for manufacturing the same, and a memory using the capacitor structure. The method includes the following operations: a substrate is provided; a stacked structure is formed on the substrate, the stacked structure including at least two support material layers arranged at an interval and a sacrificial material layer located between adjacent support material layers; capacitance holes is formed in the stacked structure, each of the capacitance holes including at least three through holes arranged in isolation; a lower electrode is formed, the lower electrode at least covering a side wall and a bottom of each through hole; the sacrificial material layer is removed, and a capacitance dielectric layer is formed on a surface of the lower electrode; and an upper electrode is formed on a surface of the capacitance dielectric layer.
Information query
IPC分类: