Invention Grant
- Patent Title: Microelectronic devices with support pillars spaced along a slit region between pillar array blocks, and related systems
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Application No.: US17063101Application Date: 2020-10-05
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Publication No.: US11723196B2Publication Date: 2023-08-08
- Inventor: Anilkumar Chandolu , Indra V. Chary
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H10B41/27 ; H10B41/10 ; H10B41/35 ; H10B43/10 ; H10B43/27 ; H10B43/35

Abstract:
A microelectronic device includes a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. At least one slit region divides the stack structure into blocks. Each block comprises an array of active pillars. Along the at least one slit region is a horizontally alternating sequence of slit structure segments and support pillar structures. The slit structure segments and the support pillar structures each extend vertically through the stack structure. Additional microelectronic devices are also disclosed as are related methods and electronic systems.
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