Invention Grant
- Patent Title: Protective liner layers in 3D memory structure
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Application No.: US17190735Application Date: 2021-03-03
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Publication No.: US11723199B2Publication Date: 2023-08-08
- Inventor: Tsu Ching Yang , Sheng-Chih Lai , Yu-Wei Jiang , Kuo-Chang Chiang , Hung-Chang Sun , Chen-Jun Wu , Feng-Cheng Yang , Chung-Te Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H10B51/20
- IPC: H10B51/20 ; H10B51/30 ; H10B43/20 ; H10B43/30

Abstract:
A memory device includes a stack of gate electrode layers and interconnect layers arranged over a substrate. A first memory cell that is arranged over the substrate includes a first source/drain conductive lines and a second source/drain conductive line extending vertically through the stack of gate electrode layers. A channel layer and a memory layer are arranged on outer sidewalls of the first and second source/drain conductive lines. A first barrier structure is arranged between the first and second source/drain conductive lines. A first protective liner layer separates the first barrier structure from each of the first and second source/drain conductive lines. A second barrier structure is arranged on an opposite side of the first source/drain conductive line and is spaced apart from the first source/drain conductive line by a second protective liner layer.
Public/Granted literature
- US20220285384A1 PROTECTIVE LINER LAYERS IN 3D MEMORY STRUCTURE Public/Granted day:2022-09-08
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