Invention Grant
- Patent Title: Intercalated metal/dielectric structure for nonvolatile memory devices
-
Application No.: US17218324Application Date: 2021-03-31
-
Publication No.: US11723291B2Publication Date: 2023-08-08
- Inventor: Mauricio Manfrini , Chung-Te Lin , Gerben Doornbos , Marcus Johannes Henricus van Dal
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H10N70/00 ; G11C13/00 ; H10B63/00

Abstract:
Some embodiments relate to an integrated chip including a memory device. The memory device includes a bottom electrode disposed over a semiconductor substrate. An upper electrode is disposed over the bottom electrode. An intercalated metal/dielectric structure is sandwiched between the bottom electrode and the upper electrode. The intercalated metal/dielectric structure comprises a lower dielectric layer over the bottom electrode, an upper dielectric layer over the lower dielectric layer, and a first metal layer separating the upper dielectric layer from the lower dielectric layer.
Public/Granted literature
- US20210242398A1 INTERCALATED METAL/DIELECTRIC STRUCTURE FOR NONVOLATILE MEMORY DEVICES Public/Granted day:2021-08-05
Information query
IPC分类: