Invention Grant
- Patent Title: Metal gate N/P boundary control by active gate cut and recess
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Application No.: US17482504Application Date: 2021-09-23
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Publication No.: US11742350B2Publication Date: 2023-08-29
- Inventor: Andrew Gaul , Chanro Park , Julien Frougier , Ruilong Xie , Andrew M. Greene , Christopher J. Waskiewicz
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent L. Jeffrey Kelly
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238

Abstract:
Embodiments of the present invention are directed to fabrication methods and resulting structures that provide metal gate N/P boundary control in an integrated circuit (IC) using an active gate cut and recess processing scheme. In a non-limiting embodiment of the invention, a gate cut is formed in an N/P boundary between an n-type field effect transistor (FET) and a p-type FET. A first portion of a first work function metal is removed over a channel region of the n-type FET. The gate cut prevents etching a second portion of the first work function metal. The first portion of the first work function metal is replaced with a second work function metal. The gate cut is recessed, and a conductive region is formed on the recessed surface of the gate cut. The conductive region provides electrical continuity across the N/P boundary.
Public/Granted literature
- US20230086785A1 METAL GATE N/P BOUNDARY CONTROL BY ACTIVE GATE CUT AND RECESS Public/Granted day:2023-03-23
Information query
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