Invention Grant
- Patent Title: Elastic wave device
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Application No.: US17964370Application Date: 2022-10-12
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Publication No.: US11742827B2Publication Date: 2023-08-29
- Inventor: Kazunori Inoue
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: KEATING & BENNETT, LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/145

Abstract:
An elastic wave device includes a piezoelectric film laminated on a first main surface of a support substrate including a recessed portion open to a first main surface. A cavity portion including the recessed portion is defined by the support substrate and the piezoelectric film. An electrode is on the piezoelectric film. The electrode includes first and second bus bars, a first electrode finger connected to the first bus bar, and a second electrode finger connected to the second bus bar. The first and second bus bars include corner portions inside the cavity portion when viewed in plan view. A curved portion as a pressure relaxation portion to relax pressure on the piezoelectric film at at least one of the corner portions of the first and second bus bars is provided between the corner portion and an outer edge of the cavity portion.
Public/Granted literature
- US20230035609A1 ELASTIC WAVE DEVICE Public/Granted day:2023-02-02
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