Invention Grant
- Patent Title: Semiconductor memory device having a passivation film and a plurality of insulating patterns on a memory cell array
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Application No.: US17360174Application Date: 2021-06-28
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Publication No.: US11744071B2Publication Date: 2023-08-29
- Inventor: Gin Suzuki , Hiroki Yamashita , Yuichiro Fujiyama , Takuji Ohashi
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 19046988 2019.03.14
- The original application number of the division: US16553231 2019.08.28
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H10B43/27 ; H01L23/528 ; H10B41/27 ; H10B41/35 ; H10B43/35

Abstract:
According to one embodiment, a semiconductor memory device includes a memory cell array; a first insulating layer; and a passivation film. The memory cell array includes first interconnect layers and a first memory pillar. The first interconnect layers extend in a first direction substantially parallel to a semiconductor substrate. The first memory pillar passes through the first interconnect layers and extends in a second direction substantially perpendicular to the semiconductor substrate. The first insulating layer is provided above the memory cell array. The passivation film is provided on the first insulating layer, and includes a protrusion at least above the memory cell array and between the passivation film and the first insulating layer.
Public/Granted literature
- US20210327899A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-10-21
Information query
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