Invention Grant
- Patent Title: Grinding method of composite substrate including resin and grinding apparatus thereof
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Application No.: US16708528Application Date: 2019-12-10
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Publication No.: US11745299B2Publication Date: 2023-09-05
- Inventor: Eiichi Yamamoto , Takahiko Mitsui , Tsubasa Bando , Satoru Ide
- Applicant: OKAMOTO MACHINE TOOL WORKS, LTD.
- Applicant Address: JP Annaka
- Assignee: OKAMOTO MACHINE TOOL WORKS, LTD.
- Current Assignee: OKAMOTO MACHINE TOOL WORKS, LTD.
- Current Assignee Address: JP Gunma
- Agency: Rankin, Hill & Clark LLP
- Priority: JP 18238095 2018.12.20
- Main IPC: B24B7/22
- IPC: B24B7/22 ; B24B55/02

Abstract:
A grinding apparatus and a grinding method of a composite substrate including resin, by which loading of a grinding wheel can be suppressed in grinding of a large-sized composite substrate including resin, and with which grinding can be effectively performed with high precision. This method for grinding a front surface of a composite substrate formed with a resin substrate embedded with at least one of a semiconductor device chip and an electrode, includes: bringing at least a part of a grinding member for grinding the front surface of the composite substrate into contact with the front surface; supplying water to at least one of a contacting part or a non-contacting part between the front surface of the composite substrate and the grinding member; and grinding the front surface of the composite substrate simultaneously with the supplying water.
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