Invention Grant
- Patent Title: Polishing body and manufacturing method therefor
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Application No.: US16317092Application Date: 2017-07-10
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Publication No.: US11745303B2Publication Date: 2023-09-05
- Inventor: Wataru Omori , Takaya Yamaguchi , Shota Kitajima , Makoto Sato
- Applicant: NORITAKE CO., LIMITED
- Applicant Address: JP Nagoya
- Assignee: NORITAKE CO., LIMITED
- Current Assignee: NORITAKE CO., LIMITED
- Current Assignee Address: JP Nagoya
- Agency: Oliff PLC
- Priority: JP 16138049 2016.07.12
- International Application: PCT/JP2017/025178 2017.07.10
- International Announcement: WO2018/012468A 2018.01.18
- Date entered country: 2019-01-11
- Main IPC: B24B37/26
- IPC: B24B37/26 ; H01L21/321 ; B24D3/00 ; B24D11/00 ; B24D3/32 ; B24B37/24 ; H01L21/304

Abstract:
In an abrasive body used for polishing by a CMP method, provided with a resin structure, a plurality of abrasive grains, and a plurality of longitudinal pores, and made in a form of disc, the longitudinal pore has a length in a thickness direction of the abrasive body longer than a length in a planar direction of the abrasive body, the resin structure includes communicating pores each of which communicating with the longitudinal pore and/or communicating with other communicating pore, the communicating pores include at least one of the abrasive grains in the pores respectively, and the average diameter of the communicating pores is not more than 18 times larger than the average diameter of the abrasive grains.
Public/Granted literature
- US20190247975A1 POLISHING BODY AND MANUFACTURING METHOD THEREFOR Public/Granted day:2019-08-15
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