Invention Grant
- Patent Title: Polishing apparatus and method of controlling inclination of stationary ring
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Application No.: US16724504Application Date: 2019-12-23
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Publication No.: US11745306B2Publication Date: 2023-09-05
- Inventor: Tomoko Owada , Makoto Fukushima , Keisuke Namiki , Osamu Nabeya , Shingo Togashi , Satoru Yamaki , Yoshikazu Kato
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Venjuris, P.C.
- Priority: JP 18244439 2018.12.27
- Main IPC: B24B49/04
- IPC: B24B49/04 ; B24B41/047

Abstract:
A polishing apparatus includes a rotatable head body having a pressing surface, a retainer ring configured to press a polishing surface while rotating together with the head body, a stationary ring, local load applying devices configured to apply a local load to the stationary ring, and a controller. The local load applying devices include a first pressing member and a second pressing member connected to the stationary ring. The first pressing member is disposed in the upstream side of the retainer ring in the traveling direction of the polishing surface, and the second pressing member is disposed in the downstream side. The controller calculates the inclination angle of the stationary ring based on a measured value of the height of at least one of the first pressing member and the second pressing member.
Public/Granted literature
- US20200206868A1 POLISHING APPARATUS AND METHOD OF CONTROLLING INCLINATION OF STATIONARY RING Public/Granted day:2020-07-02
Information query
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