Invention Grant
- Patent Title: Modular confined organic print head and system
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Application No.: US17389694Application Date: 2021-07-30
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Publication No.: US11746408B2Publication Date: 2023-09-05
- Inventor: William E. Quinn , Gregory Mcgraw , Matthew King , Gregg Kottas
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Butzel Long
- Main IPC: C23C14/22
- IPC: C23C14/22 ; C23C14/12 ; C23C14/24 ; H10K50/11 ; H10K71/10 ; H10K101/40

Abstract:
Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.
Public/Granted literature
- US20210355575A1 MODULAR CONFINED ORGANIC PRINT HEAD AND SYSTEM Public/Granted day:2021-11-18
Information query
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