Invention Grant
- Patent Title: Heat-loss pressure microsensors
-
Application No.: US17905813Application Date: 2020-04-08
-
Publication No.: US11747231B2Publication Date: 2023-09-05
- Inventor: Bruno Tremblay , Alex Paquet
- Applicant: INSTITUT NATIONAL D'OPTIQUE
- Applicant Address: CA Québec
- Assignee: INSTITUT NATIONAL D'OPTIQUE
- Current Assignee: INSTITUT NATIONAL D'OPTIQUE
- Current Assignee Address: CA Quebec
- Agency: MASCHOFF BRENNAN
- International Application: PCT/CA2020/050460 2020.04.08
- International Announcement: WO2021/203187A 2021.10.14
- Date entered country: 2022-09-07
- Main IPC: G01L11/00
- IPC: G01L11/00 ; G01L27/00 ; G01K7/22

Abstract:
A heat-loss pressure microsensor for measuring a gas pressure is disclosed that includes a plurality of pressure gauges arranged proximate to one another on a substrate. The gauges may include a pair of gauges, each gauge including a thermistor having an electrical resistance that varies with its temperature, the thermistor's temperature being responsive to the gas pressure, a platform to receive the thermistor, and a support structure to hold the platform above the substrate. Each gauge may be configured to produce a gauge output signal related to the electrical resistance of its thermistor. The two gauges are configured with their platforms having equal nominal perimeters and different nominal surface areas, and their support structures having the same nominal geometry. A differential signal may be obtained from the two gauge output signals. The differential signal conveys information about the gas pressure and exhibits reduced sensitivity to fabrication-related dimensional variations.
Public/Granted literature
- US20230131448A1 HEAT-LOSS PRESSURE MICROSENSORS Public/Granted day:2023-04-27
Information query