Invention Grant
- Patent Title: Method of producing test-sample for transmission electron microscope
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Application No.: US16976005Application Date: 2018-05-25
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Publication No.: US11747243B2Publication Date: 2023-09-05
- Inventor: Hajime Sasaki
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- International Application: PCT/JP2018/020100 2018.05.25
- International Announcement: WO2019/224993A 2019.11.28
- Date entered country: 2020-08-26
- Main IPC: G01N1/28
- IPC: G01N1/28

Abstract:
In a method of producing a test-sample for a transmission electron microscope, it is so arranged that a massive body in a rectangular parallelepiped shape including a multiple quantum well active layer is cut out from a laser diode being a workpiece; thereafter, a test-sample is produced in which tilting oblique cutoff portions are formed at corner portions contiguously bordering on an upper surface of the massive body, so that surface-part active layers can be visually identified thereat; and thereafter, the test-sample is made thinner, and also an observation test-sample is cut out therefrom by taking on, as references, two surface-part active layers visually identifiable at the tilting oblique cutoff portions.
Public/Granted literature
- US20210102872A1 METHOD OF PRODUCING TEST-SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPE Public/Granted day:2021-04-08
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