Invention Grant
- Patent Title: Magnetic sensor and inspection device
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Application No.: US17395183Application Date: 2021-08-05
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Publication No.: US11747303B2Publication Date: 2023-09-05
- Inventor: Hitoshi Iwasaki , Satoshi Shirotori , Akira Kikitsu , Yoshihiro Higashi
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP 20206822 2020.12.14
- Main IPC: G01N27/90
- IPC: G01N27/90 ; G01N33/2045

Abstract:
According to one embodiment of the invention, a magnetic sensor includes a first sensor part. The first sensor part includes a first magnetic member, a first counter magnetic member, and a first magnetic element. A direction from the first magnetic member to the first counter magnetic member is along a first direction. The first magnetic element includes one or a plurality of first extending portions. A first portion of the first extending portion overlaps the first magnetic member in a second direction crossing the first direction. A first counter portion of the first extending portion overlaps the first counter magnetic member in the second direction. A first direction length along the first direction of the first extending portion is longer than a third direction length along a third direction of the first extending portion. The third direction crosses a plane including the first direction and the second direction.
Public/Granted literature
- US20220187247A1 MAGNETIC SENSOR AND INSPECTION DEVICE Public/Granted day:2022-06-16
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