Invention Grant
- Patent Title: Method and device for scanning a sample
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Application No.: US16760486Application Date: 2018-11-05
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Publication No.: US11747604B2Publication Date: 2023-09-05
- Inventor: Lars Friedrich , Holger Birk
- Applicant: LEICA MICROSYSTEMS CMS GMBH
- Applicant Address: DE Wetzlar
- Assignee: LEICA MICROSYSTEMS CMS GMBH
- Current Assignee: LEICA MICROSYSTEMS CMS GMBH
- Current Assignee Address: DE Wetzlar
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE 2017125688.1 2017.11.03
- International Application: PCT/EP2018/080208 2018.11.05
- International Announcement: WO2019/086680A 2019.05.09
- Date entered country: 2020-04-30
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B21/06

Abstract:
A method for scanning a sample includes generating at least two illumination points in order to form a point pattern, wherein the point pattern has a settable number of illumination points. At least one freely selectable parameter for defining the point pattern is preset or is set. At least one predefined region of the sample is scanned by moving the point pattern defined by the freely selectable parameter along a first direction such that scan lines assigned to the illumination points of the point pattern are generated, and along a second direction such that further scan lines are generated in each case following the scan lines. The movement of the point pattern in the second direction is carried out in scan steps of identical size or at a constant speed. The illumination points of the point pattern are arranged on a line along the second direction.
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