Invention Grant
- Patent Title: Imprint method, imprint apparatus, and method of manufacturing article
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Application No.: US16780023Application Date: 2020-02-03
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Publication No.: US11747722B2Publication Date: 2023-09-05
- Inventor: Zenichi Hamaya , Masahiro Tamura , Yoshinari Someya
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: ROSSI, KIMMS & McDOWELL LLP
- Priority: JP 19024693 2019.02.14
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C35/08 ; B29C59/02

Abstract:
The present invention provides an imprint method that performs a process of forming a pattern of an imprint material on a substrate using a mold, for each of a plurality of shot regions on the substrate, the process including: dispensing the imprint material onto the substrate; moving, to below the mold, the substrate on which the imprint material is dispensed; and supplying, in a moving path of the substrate in the moving, a first gas that promotes filling of the imprint material into a pattern of the mold, wherein in a case where a target shot region to be subjected to the process meets a predetermined condition, supplying a second gas having a lower oxygen concentration than air onto the substrate is additionally executed for the target shot region after the supplying the first gas.
Public/Granted literature
- US20200264507A1 IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2020-08-20
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