- Patent Title: Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method
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Application No.: US17131094Application Date: 2020-12-22
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Publication No.: US11747724B2Publication Date: 2023-09-05
- Inventor: Kiwamu Sue , Sho Kataoka , Yusuke Yoshigoe , Takatoshi Inari , Masatoshi Arai , Takaya Maehashi , Yoshitaka Komuro , Daisuke Kawana
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: TOKYO OHKA KOGYO CO., LTD.,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Kawasaki; JP Tokyo
- Agency: KNOBBE, MARTENS, OLSON & BEAR LLP
- Priority: JP 19233068 2019.12.24 JP 20207558 2020.12.15
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07F7/00

Abstract:
Organically modified metal oxide nanoparticles containing two or more cores including a plurality of metal atoms and a plurality of oxygen atoms covalently bonded to the plurality of metal atoms; a first modifying group that is a ligand coordinated to each of the cores and selected from the group consisting of a carboxylic acid carboxylate, a sulfonic acid sulfonate, and a phosphonic acid phosphonate; and a second modifying group that is coordinated to each of the cores and is a ligand having a structure different from that of the first modifying group and/or an inorganic anion, in which organically modified metal oxide nanoparticles have a structure in which the cores are crosslinked through a coordinate bond by at least the first modifying group.
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