Invention Grant
- Patent Title: Chemical liquid, chemical liquid storage body, pattern forming method, and kit
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Application No.: US16390023Application Date: 2019-04-22
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Publication No.: US11747727B2Publication Date: 2023-09-05
- Inventor: Tetsuya Kamimura , Satomi Takahashi
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JP 16225452 2016.11.18 JP 17030866 2017.02.22 JP 17218006 2017.11.13
- Main IPC: G03F7/004
- IPC: G03F7/004 ; B65D85/00 ; G03F7/16 ; G03F7/26 ; G03F7/20 ; H01L21/027 ; G03F7/039 ; G03F7/00 ; G03F7/075

Abstract:
An object of the present invention is to provide a chemical liquid which makes it possible to form a thinner resist film having a uniform thickness on a substrate by using a small amount of resist composition and demonstrates excellent defect inhibition performance. Another object of the present invention is to provide a pattern forming method. A chemical liquid of the present invention contains a mixture of two or more kinds of organic solvents and an impurity metal containing one kind of element selected from the group consisting of Fe, Cr, Ni, and Pb, in which a vapor pressure of the mixture is 50 to 1,420 Pa at 25° C., in a case where the chemical liquid contains one kind of the impurity metal, a content of the impurity metal in the chemical liquid is 0.001 to 100 mass ppt, and in a case where the chemical liquid contains two or more kinds of the impurity metals, a content of each of the impurity metals in the chemical liquid is 0.001 to 100 mass ppt.
Public/Granted literature
- US20190243240A1 CHEMICAL LIQUID, CHEMICAL LIQUID STORAGE BODY, PATTERN FORMING METHOD, AND KIT Public/Granted day:2019-08-08
Information query
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