Invention Grant
- Patent Title: Semiconductor developer tool and methods of operation
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Application No.: US17303525Application Date: 2021-06-01
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Publication No.: US11747729B2Publication Date: 2023-09-05
- Inventor: Yung-Yao Lee , Chen Yi Hsu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Harrity & Harrity, LLP
- Main IPC: G03F7/16
- IPC: G03F7/16 ; H01L21/027

Abstract:
A developer tool described herein includes a dispenser that includes a greater quantity of nozzles in a central portion relative to a perimeter portion such that the developer tool is capable of more effectively removing material from a photoresist layer near a center of a substrate (which tends to be thicker near the center of the substrate relative to the edge or perimeter of the substrate). In this way, the developer tool may reduce the amount of photoresist residue or scum remaining on the substrate near the center of the substrate after a development operation, which may enable defect removal and/or prevention, may increase semiconductor processing yield, and/or may increase semiconductor processing quality.
Public/Granted literature
- US20220299876A1 SEMICONDUCTOR DEVELOPER TOOL AND METHODS OF OPERATION Public/Granted day:2022-09-22
Information query
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