Invention Grant
- Patent Title: Curing a shaped film using multiple images of a spatial light modulator
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Application No.: US17100477Application Date: 2020-11-20
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Publication No.: US11747731B2Publication Date: 2023-09-05
- Inventor: James W. Irving , Edward Brian Fletcher , Nilabh Kumar Roy
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABISHIKI KAISHA
- Current Assignee: CANON KABISHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agent Daniel Ratoff
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00 ; G02B27/12 ; H04N9/31

Abstract:
A shaping system and method of shaping with the shaping system. The shaping system may include a spatial light modulator. The shaping system may include a radiation source to illuminate the spatial light modulator with actinic radiation. The shaping system may include a beam splitter configured to receive actinic radiation from the spatial light modulator and emit a first image of the spatial light modulator and a second image of the spatial light modulator. The shaping system may include a beam combiner configured to receive the first image and the second image and emit a combined image. The combined image may include the first image; and the second image offset from the first image. The shaping system may include a projection system configured to receive the combined image and illuminate formable material between a template and a substrate with a projected image at a plane of the formable material.
Public/Granted literature
- US20220163893A1 Curing a Shaped Film Using Multiple Images of a Spatial Light Modulator Public/Granted day:2022-05-26
Information query
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