Invention Grant
- Patent Title: Method and apparatus for imaging using narrowed bandwidth
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Application No.: US17434802Application Date: 2020-02-10
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Publication No.: US11747739B2Publication Date: 2023-09-05
- Inventor: Willard Earl Conley , Joshua Jon Thornes , Duan-Fu Stephen Hsu
- Applicant: ASML Netherlands B. V. , Cymer, LLC
- Applicant Address: NL CA Veldhoven
- Assignee: ASML NETHERLANDS,CYMER, LLC
- Current Assignee: ASML NETHERLANDS,CYMER, LLC
- Current Assignee Address: NL Veldhoven; US CA San Diego
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- International Application: PCT/EP2020/053252 2020.02.10
- International Announcement: WO2020/177979A 2020.09.10
- Date entered country: 2021-08-30
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00

Abstract:
Systems, methods, and computer programs for increasing a contrast for a lithography system are disclosed. In one aspect, a method of optimizing a process for imaging a feature on a substrate using a photolithography system is disclosed, the method including obtaining an optical spectrum of a light beam for the imaging, wherein the light beam includes pulses having a plurality of different wavelengths, and narrowing the optical spectrum of the pulses of the light beam for the imaging to improve a quality metric of the imaging.
Public/Granted literature
- US20220163899A1 METHOD AND APPARATUS FOR IMAGING USING NARROWED BANDWIDTH Public/Granted day:2022-05-26
Information query
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