Invention Grant
- Patent Title: Systems and methods for repetitive tuning of matching networks
-
Application No.: US17837767Application Date: 2022-06-10
-
Publication No.: US11749506B2Publication Date: 2023-09-05
- Inventor: Gary Russell , Keith Rouse , Dean Maw
- Applicant: COMET TECHNOLOGIES USA, INC.
- Applicant Address: US CA San Jose
- Assignee: COMET TECHNOLOGIES USA, INC.
- Current Assignee: COMET TECHNOLOGIES USA, INC.
- Current Assignee Address: US CA San Jose
- Agency: Nolte Lackenbach Siegel
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46
Abstract:
A method for repetitive tuning of a matching network in a radio frequency plasma processing device, the method including detecting a condition within the matching network and determining if the condition is a known condition for the matching network. Also, finding a prior solution and to the condition when the condition is the known condition for the matching network; and replicating the prior solution for the condition in the matching network.
Public/Granted literature
- US20220301826A1 SYSTEMS AND METHODS FOR REPETITIVE TUNING OF MATCHING NETWORKS Public/Granted day:2022-09-22
Information query
