Invention Grant
- Patent Title: Plasma observation system and plasma observation method
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Application No.: US17149150Application Date: 2021-01-14
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Publication No.: US11749511B2Publication Date: 2023-09-05
- Inventor: Ryoji Yamazaki , Hiroyuki Miyashita , Mikio Sato
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Venjuris, P.C.
- Priority: JP 20008508 2020.01.22
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G01J3/02 ; G01J3/28

Abstract:
A plasma observation system includes a plasma processing apparatus which includes a processing container in which a substrate is processed with plasma, and a plurality of observation windows each capable of observing an emission state of the plasma in the processing container; and a measuring device including a light receiver configured to receive a plurality of light beams intersecting in the processing container through a plurality of observation windows, and a controller configured to specify an observation point of the plasma and determine a state of the plasma at the observation point based on the plurality of light beams received by the light receiver.
Public/Granted literature
- US20210225623A1 PLASMA OBSERVATION SYSTEM AND PLASMA OBSERVATION METHOD Public/Granted day:2021-07-22
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