Invention Grant
- Patent Title: Side storage pods, equipment front end modules, and methods for operating equipment front end modules
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Application No.: US16657698Application Date: 2019-10-18
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Publication No.: US11749537B2Publication Date: 2023-09-05
- Inventor: Patrick Pannese , Murali Narasimhan , Paul B. Reuter , Nir Merry
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B01D46/00
- IPC: B01D46/00 ; B01D53/04 ; H01L21/67 ; H01L21/677 ; H01L21/673
Abstract:
Electronic device processing assemblies including an EFEM with at least one side storage pod attached thereto. The side storage pod has a side storage pod container. A supply conduit extends between an upper plenum of the EFEM to the side storage pod container. A fan causes purge gas to simultaneously flow into the EFEM chamber and into the side storage pod container. The fan also causes recirculation of the purge gas from the EFEM chamber. Methods of operating EFEMs and EFEMs are also disclosed.
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