Invention Grant
- Patent Title: Substrate transfer apparatus and substrate placement portion rotation axis searching method
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Application No.: US16652160Application Date: 2018-07-30
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Publication No.: US11749547B2Publication Date: 2023-09-05
- Inventor: Masaya Yoshida , Kenji Noguchi , Hiroyuki Okada
- Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Applicant Address: JP Kobe
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee Address: JP Kobe
- Agency: Oliff PLC
- Priority: JP 17191618 2017.09.29
- International Application: PCT/JP2018/028451 2018.07.30
- International Announcement: WO2019/064890A 2019.04.04
- Date entered country: 2020-03-30
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G47/90 ; H01L21/67 ; H01L21/68 ; G05B19/402 ; B25J13/08

Abstract:
A target provided to a substrate placement portion is detected by an object detection sensor at a plurality of rotation positions of the substrate placement portion. An index length which is a distance from a robot reference axis to the target in a direction perpendicular to an axial direction, or information correlated therewith, is calculated. At least one of a rotation position of a detection line about the robot reference axis and a rotation position of the substrate placement portion about a rotation axis when the target located on a line connecting the robot reference axis and the rotation axis is detected is calculated on the basis of the calculated index length or the calculated information correlated therewith. A direction in which the rotation axis is present as seen from the robot reference axis is specified on the basis of the calculated rotation position.
Public/Granted literature
- US20200243362A1 SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PLACEMENT PORTION ROTATION AXIS SEARCHING METHOD Public/Granted day:2020-07-30
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