Invention Grant
- Patent Title: Semiconductor package and manufacturing method thereof
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Application No.: US17016594Application Date: 2020-09-10
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Publication No.: US11749646B2Publication Date: 2023-09-05
- Inventor: Akihito Sawanobori
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 20017171 2020.02.04
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/552 ; H01L23/00 ; H01L23/31 ; H01L23/498 ; H01L21/48 ; H01L21/56

Abstract:
A semiconductor package according to one embodiment comprises a substrate. A semiconductor chip is provided on the substrate. A resin layer is configured to cover the semiconductor chip on the substrate. A metal film is configured to cover a surface and side surfaces of the resin layer. The metal film is a laminated film including first to fourth metal layers. The first metal layer is configured to cover the resin layer. The second metal layer includes a first metal material that is different from a material of the first metal layer. The third metal layer includes an alloy of the first metal material forming the second metal layer and a second metal material different from the first metal material. The fourth metal layer is configured to cover the second or third metal layer.
Public/Granted literature
- US20210242138A1 SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-08-05
Information query
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