Invention Grant
- Patent Title: Integrated circuit structures with well boundary distal to substrate midpoint and methods to form the same
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Application No.: US17067033Application Date: 2020-10-09
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Publication No.: US11749671B2Publication Date: 2023-09-05
- Inventor: Kaustubh Shanbhag , Glenn Workman
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L21/8238 ; H01L21/762

Abstract:
The disclosure provides integrated circuit (IC) structures and methods to form the same. Methods according to the disclosure may be performed on a substrate having a first doping type, the substrate extending between a first end and a second end. A deep well is formed within the substrate, the deep well including a well boundary defined between the deep well and a remainder of the substrate. The well boundary is horizontally distal to a midpoint between the first end and the second end of the substrate. A first active semiconductor region is formed at least partially over the substrate, and an oppositely-doped second active semiconductor region is formed at least partially over the deep well.
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